For customers looking for a high-vacuum exhaust unit
・High-vacuum pump system combined with a turbo-molecular pump
・Clean exhaust and vacuum
・Compact
・Ease of operation
Features
Clean exhaust and vacuum
This model is a completely dry high-vacuum pump system combining a turbo-molecular pump and an oil-free scroll vacuum pump.
Compact
The unit is very compact, requiring little installation space. It can be installed in the vicinity of a device currently in use. Equipped with wheels, the unit is easy to move.
Ease of operation
The unit can be operated in two modes. The scroll vacuum pump and turbo-molecular pump are operated separately in manual mode, and the two pumps are started simultaneously at the touch of a button in auto mode*. One of these modes can be selected accordin
* In auto mode, the capacity of the unit, including the chamber and piping parts, is limited.
Optional accessory products
Turbo-molecular pump
We build a high-vacuum pump system using the turbo-molecular pump specified by the customer.
Others
The unit can be customized with factory-installed optional accessory products, such as vacuum chambers, vacuum gauges, automatic valves, etc.. Please consult with your ANEST IWATA’s Vacuum Equipment specialist
Applications
■Accelerator -
■X-ray analyzer
■Synchrotron radiation -
■Electron microscope
■Leak test -
■Test analyzer
■Mass analyzer -
■Auxiliary high-vacuum pump system
■Surface analyzer -
■Others
Safety precautions
This vacuum pumping system is suitable for clean processes only.
Do not use toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles.