The Dektak XTL™ stylus profilometer accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features pneumatic vibration isolation and a fully enclosed workstation with easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput.
Robust
automation setup and operation
Programs fiducials and unlimited measurement sites to maximize throughput and minimize errors.
Dual
camera control
Simplifies measurement setup and navigation to points of interest faster.
Easy
analysis and data collection
Automates analysis routines and reports only desired features on complex samples.
FEATURES
Enhanced software features make the Dektak XTL the most powerful, easiest to use stylus profiler available. The system utilizes Vision64 software that enables unlimited measurement sites, 3D mapping, and highly customized characterization with hundreds of built-in analysis tools. Vision Microform software also measures shapes, such as radius of curvature. Pattern recognition minimizes operator error and enhances measurement location accuracy. The all-in-one software package combines data collection and analysis with an intuitive workflow.
Unmatched Stylus Technology
The Dektak XTL builds upon over 50 years of stylus expertise and application customization for production facilities to meet the stringent industry roadmaps of both today and tomorrow.