Pressure sensor PVC3000

vacuum pressureconductivitymedical

Posifa's PVC3000 series of MEMS Thermopile Vacuum Sensors bring a breakthrough to vacuum measurement by offering an effective range from 0.1 millitorr (0.013 Pascal) all the way to atmophere (760 torr, or 101K Pascal). By contrast, a Pirani vacuum sensor’s upper range is usually capped at 30 torr. A piezoresistive pressure sensor cannot measure vacuum below 10 torr. A costly capacitive pressure sensor is limited to 0.1 torr at the lower end of its range. Thus, PVC3000 can do the job of two sensors, i.e. a Pirani sensor and a piezeresistive/capacitive pressure sensor. In addition, PVC3000 has a low power consumption of 10 mW (assuming pulsed excitation with a 75% duty cycle). By using smaller duty cycles power consumption can be reduced further. PVC3000 uses Posifa’s second generation thermal conductivity sensor die (PTCD20), and operates under the principle that the thermal conductivity of gases is proportional to its vacuum pressure. PVC3000 is available in either SMD or TO metal can form factors. FEATURES • Range: 0.0001 to 760 Torr (0.013 to 101K Pa) • Low power consumption: <=10 mW • Can be cleaned by immersing in solvent, prolonging useful life APPLICATIONS • Leak detection in any closed system main- tained under primary vacuum, such as in Vacu- um Insulated Panels • Portable and fixed vacuum gauges ABSOLUTE MAXIMUM RATINGS • Operating Temperature: -40 to 85 °C • Storage Temperature: -40 to 90 °C • Shock: 100 g peak (5 drops, 3 axis)