Medical gas scrubber GABA AWE 050 AE

Venturi

Wet scrubber gas abatement for EPI processes Innovative wet scrubber technology For critical EPI processes in the semiconductor industry Patented inlet clogging preventer Extended service intervals No honey trap necessary to collect by-products Frequency-controlled venturi unit Four process inlets for connection to four different chambers Benefits GABA AWE are our innovative wet scrubbers, specially developed for critical EPI processes in the semiconductor industry. They combine maximum operational reliability with the highest level of process stability. Our AWE series is equipped with a patented noxious gas inlet that prevents the scrubber inlet from clogging. This leads to increased service life and, at the same time, to low operating costs. Maintenance is reduced to changing the inlet clogging preventer at defined service intervals. This can easily be carried out without the need to disassemble the unit. The special design of the GABA AWE makes the separation of by-products from the production process in a honey trap obsolete. The wet scrubber can handle all process residues without blocking the gas inlet. Water-soluble by-products react in the scrubbing liquid, solids are separated as particles or pumped away with the waste water during operation. The vacuum for the production process is provided and actively controlled via a frequency-controlled venturi unit. This ensures constant process pressure at the production plant and trouble-free operation. All process settings can be made via a programmable logic controller (PLC) with color display and touch screen.