Efficient flameless catalytic gas abatement
Combination of flameless catalytic and thermal-wet gas abatement technology
Treatment of combustible and soluble gases
Excellent abatement efficiency
High temperature electric heater
Full swap system
Four process inlets for connection to four different chambers
Benefits
GABA AFC gas abatement systems are designed to reduce or remove hazardous gases and air pollutants during manufacturing processes. Basically, they change the chemical composition of the gases. By using a combination of the flameless catalytic thermal oxidation and the thermal-wet gas abatement technology it is possible to treat both, combustible and soluble gases.
GABA AFC use a high temperature heater with heated catalysts. This allows for a perfect combustion without a flame. In order to increase the removal efficiency of the target gases, an appropriate temperature and correct operating fluids are crucial. The thermal system provides stable treatment conditions while producing substantially fewer by-products (i.e. NOx, CO2, etc.). Water-soluble gases, by-products and hot gases from the reactor chamber are then processed in the wet chamber.
To avoid contamination during maintenance, GABA AFC have been designed as full swap systems. All modules can be replaced individually without opening the chamber.
AFC series gas abatement systems come with four process inlets as standard. The system can thus be connected to four different chambers of a process tool or to multiple tools, depending on the application.