Whole Wafer Scan——High Throughput Platform
Whole Wafer Image Capturing
Image resolution: 20,000 x 20,000 pixels (~1.6GB), 10um/pixel
Image format: TIFF
Whole Wafer Image
Analyzing
Auto-alignment and auto-circling
Resolution: 2, 5, 10, 40 μm
Laser excitation wavelength: 532 nm and 635 nm
Laser power:
532 nm: 13+/-10% mW
635 nm: 13+/-10% mW
Compatible Fluorophores: Cy3 & Cy5
Wafer size: 4”~12” Si/Glass wafer
Scan area: whole wafer
Loader capacity: 1 wafer
Detection type: Dynamic focus with real-time confocal and 2 PMTs
Scan speed: 21 mins @10 μm (8" wafer)
Sensitivity: <0.2 fluoro/μm²
Dynamic range: 10⁴
Digital resolution: 16 bits
File format: TIFF
Operation software (BioScan control & BioImage Analyzer)