Plasma surface cleaning system Pico

semi-automaticmedical

The Pico plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Pico plasma systems. Pico plasma systems are primarily used in the following sectors: Analytics (SEM, TEM) Archaeology Automotive Research and development departments Semiconductor technology Small batch production Plastics Technology Medical engineering Micro-system technology Sensor technology Sterilising Textile technology Basic equipment Housing sizes vary depending on components/options Chamber volume: depending on the version, 4 to 15 litres Voltage supply: 230 V for table unit, 400 V / 3 phases for stand-alone unit Gas supply Needle valves Mass flow controller (MFCs) Vacuum chambers Stainless steel round with cover (approx. ∅ 150 mm, L 320 mm or L 600 mm) Stainless steel rectangular, hinged door (approx. W 160 mm x H 160 mm x D 325 mm or 600 mm) Aluminium rectangular, hinged door (approx. ∅ 160 mm x 160 mm, L 325 mm or L 600 mm) Quartz glass (UHP) round with lid or hinged door (approx. ∅ 130 mm, L 300 mm or L 600 mm) Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 130 mm, L 300 mm or L 600 mm) Charge Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass Electrodes Single- or multi-tier RIE