Low-pressure plasma surface cleaning system Nano

automaticmedical

The Nano plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Nano plasma systems. Nano plasma systems are primarily used in the following sectors: Analytics, archaeology, automotive, research and development departments, semiconductor technology, small-series manufacture, plastics technology, medical engineering, micro-system engineering, sensory technology, sterilising, textile technology Basic equipment Housing sizes vary depending on components/options Chamber volume: depending on the version, 18 to 36 litres Voltage supply: 230 V for table unit, 400 V / 3 phases for stand-alone unit Gas supply Needle valves Mass flow controllers (MFCs) Vacuum chambers Stainless steel round with cover (approx. ∅ 267 mm, L 420 mm or L 600 mm) Stainless steel rectangular, hinged door (approx. W 240 mm x H 240 mm x D 420 mm or 600 mm) Aluminium rectangular, hinged door (approx. ∅ 240 mm x 240 mm, L 420 mm or L 600 mm) Quartz glass (UHP) round with lid or with hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm) Borosilicate glass (UHP) round with lid or with hinged door (approx. ∅ 240 mm, L 400 mm or L 600 mm) Charge Products carrier (optionally, water-cooled), quartz glass boats, powder rotary drum, bulk goods rotary drum, aluminium panel, stainless steel, borosilicate glass, quartz glass Electrodes Single- or multi-tier RIE