The Tetra 45 plasma systems can be combined in different variants in a modular manner. Below, please find an overview over the most common options using the Tetra 45 plasma systems.
The chamber with 125 mm height and 572 mm width is particularly suitable for large-sized components. Since the chamber is made from aluminium extruded sections, the length can be flexibly adjusted.
Analytics (SEM, TEM)
Archaeology
Automotive
Life sciences
Elastomer technology
Electrical engineering
Electron microscopy
Precision engineering
Research and development
Semiconductor technology
Small batch production
Plastics Technology
Medical engineering
Micro-system technology
Solar cell technology
Textile technology
Model 1, standard system
rotary switch control in basic unit type A
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
Needle valve
Model 2, standard system
BASIC PC control in basic unit type A
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC
Model 3, standard system
FULL PC control (Windows 10 IoT) in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
MFC
Model 4, corrosive gas system (e.g. for fluorinated process gases)
rotary switch control in basic unit type A
(W 850 mm x D 800 mm x H 1,700 mm)
Vacuum chamber rectangular, aluminium, hinged door
(W: 572 mm x D 650 mm x H 125 mm)
Gas supply:
Needle valve