The Tetra 320R production system with its chamber volume of 320 litres and PC control is used in series production (cleaning, etching and activation):
Control cabinet: W 870 mm, H (with feet) 1860 mm, D 1400 mm
Chamber: ∅ 640 mm, D 1000 mm
Chamber volume: approx. 320 litres
Gas supply: 2 gas channels via MFCs
Generator: 1 pc. (80 kHz/ 300 Watt)
Control: PC control (Windows)
Parts holding fixture: according to customer requirements