The Tetra 2800-LF-PCproduction system with its chamber volume of 2,800 litres and PC control is used in series production (cleaning, etching and activation).
Analytics
Archaeology
Automotive
Research and development departments
Semiconductor technology
Small batch production
Plastics Technology
Medical engineering
Micro-system technology
Sensor technology
Sterilising
Textile technology
Control cabinet
integrated: W 600 mm, H 1700 mm, D 800 mm
Vacuum chambers
∅ 1200 mm, D 2500 mm
Chamber volume
approx. 2800 litres
Gas supply
3 gas channels via MFCs
Generator
all common plasma frequencies are available
Control
PC control (Windows) with industrial field bus