Fully automated laminar flow wet bench
Felcon wet processing tools are used where substrates or products require chemical etching or cleaning. This is often as part of a larger manufacture of silicone wafers for example, or in medical applications such as stent manufacture. Felcon Wet Benches are either manually operated or automatically operated with robotic product transfer. Felcon Wet Benches may be built using “FM” (Factory Mutual) materials of construction with optional fire detection and suppression systems. They are suitable for all types of cleanrooms and may also incorporate Laminar Air Flow with HEPA filters.
MANUAL WET PROCESS BENCHES: POLYPROPYLENE (ACID BASED), STAINLESS STEEL (SOLVENT BASED), WITH LAMINAR AIR FLOW
PROCESS BATHS: AUTOMATED QUICK DUMP RINSE - CONSTANT TEMP QUARTZ BATH - HEATED PFA S/S BATH - DI OVERFLOW WEIR BATH - MEGA SONIC BATH - SPIN DEVELOPER BATH - ULTRASONIC BATH - AMBIENT TEMP BATH WITH HEATER AND CHILLER - GLOVE WASH