CFE-SEM microscope SU8600

for researchbenchtopcold field emission

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM lineup. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more. Features UltraHigh-Resolution Hitachi’s high-brightness cold field emission source provides ultrahigh-resolution images even at Ultra-low voltages. Enhanced User Experience with Advanced Automation The “EM Flow Creator“ software option allows users to configure repeatable SEM operation sequences. Various SEM functions can be assembled in the EM Flow Creator’s window by a drag-and-drop method and then saved as a recipe for later use. Once a recipe is configured, automated data collection under the set conditions can be performed with high accuracy and repeatability. Specifications Electron Gun - Cold cathode field emission gun with anode heating system Accelerating Voltage - 0.5 to 30 kV Landing Voltage(*1) - 0.01 to 20 kV Standard Detectors Upper Detector (UD) with ExB filter: SE/BSE signal mixing function Lower Detector (LD) Option Detectors - Top Detector (TD) In-Column Middle Detector (IMD) Out-Column Crystal Type BSED (OCD) Semiconductor Type BSED (PD-BSED) Cathodoluminescence Detector (CLD) STEM Detector Specimen Stage Stage Control - 5-axis Motor Drive Movable Range - 　 　X - 0 to 110 mm 　Y - 0 to 110 mm 　Z - 1.5 to 40 mm 　T - -5 to 70° 　R - 360° Specimen Chamber - Specimen Size - Max. φ150 mm(*3)