Using Hitachi' s latest high speed, 4-segment Backscattered Electron Detector, a three-dimensional model can be generated without sample tilting or manually collecting consecutive images.
Directly edits on the flexible layout display.
Supports various measurements such as height, area, and volume as well as ISO-compliant□surface roughness.
Automated and traceable analysis workflow including report creation.
Features
Hitachi map 3D Software Overview
Hitachi map 3D generates three-dimensional images without sample/stage tilting or image shift.
Hitachi map 3D captures all four directional images simultaneously with a high-speed, segmented Backscattered Electron Detector (BSED).
Flexible Profile Analysis
Automatically collects data from the sample surface or cross-sectional profile for surface roughness and structural height, or makes various measurements between the 2 points.
Cross-sectional profile display from any points within the 3D map
Measurement location can be selected freely from vertical, horizontal, and diagonal points from the 3D image.
Whenever the measurement location is changed, the measurement results respond in real time.
Height and angle measurements are possible on the user defined line profile.
X, Y, and Z analysis between 2 points on the surface or cross section.
Distance, Z-height, slope, or angle can be measured between 2 points on the 3D map image.
High-definition 3D Image Display
Numerous 3D rendering modes are user selectable for surface characterization. Animations can be applied to the 3D image and saved as a video file.