The Cold Field Emission source is ideal for high-resolution imaging with a small source size and energy spread. Innovative CFE Gun technology contributes the ultimate FE-SEM with superior beam brightness and stability, affording high-resolution imaging and high-quality elemental analysis.
To allow for stable data acquisition at the instrument‘s highest performance levels, the SU9000II offers new capabilities that render automated adjustments of the optical system—and the new EM Flow Creator software package as an option to render automated data acquisition, particularly sequential data collection.
In addition, unique optical system design has a capability of EELS for advanced material analysis.
Features
Newly designed CFE GUN provides high brightness and an extremely stable emission current.
Superior low kV performance for observing beam sensitive materials. The SE resolution of 0.7 nm even at 1.0 kV landing voltage (with deceleration feature option) is guaranteed.
Newly capabilities that render automated adjustments of the optical system and an optional function that render automated data acquisition allow sequential data collection.
Improved vacuum technology that allows for UHV levels for reduced sample contamination.
Highly engineered instrument enclosure featuring both superior strength and stability to allow for high resolution imaging in a broad range of environmental conditions.
Newly designed objective lens enables high resolution imaging at a low acceleration voltage.
Side entry sample exchange system increases throughput by reducing the time required to change samples and automatically positioning the sample at the current WD.