The JED-2300 Analysis Station Plus, an EDS system to perform elemental analysis by detecting characteristic X-rays generated from a specimen, was developed based on the design concept of “Seamless from Observation to Analysis” using many years of experience of JEOL in electron optics and EDS.
This EDS system is fully integrated with our SEMs, FIB-SEMs and TEMs for comprehensive data management (microscope images and X-ray data) with an easy-to-understand user interface.
For FIB-SEM systems equipped with motor drive stages, data management over large areas is facilitated with visualized operations, such as microscope images with different magnification or different stage position, and locations of elemental maps.
♦Operation icons
Icons are arranged from left to right which guide the user through each step of data collection. In addition, the functions of each icon are displayed for visual understanding.
♦Indexed image display
The operator can quickly access the acquired data from the indexed image display.
♦List of analysis data
Images and analysis results are automatically saved in the same folder for quick access. When the operator selects any area on the indexed image display, data for the respective areas will be displayed in the list of analysis data, thus simplifying data management.
The peak shape of the Bi X-ray lines is found to be different between the acquired spectrum (pink) and the calculated spectrum (blue).
Re-examination of the Bi peak position indicated the presence of Pb. When Pb was added to the analysis results, the two peak shapes matched. From this result, Pb was confirmed to be contained in the specimen.