X-ray microscope GRAND ARM™2

TEMSTEMlaboratory

This new "GRAND ARM™2" enables observation at ultrahigh spatial resolution with highly sensitive analysis over a wide range of accelerating voltages. FHP2 newly developed objective lens pole-piece The FHP objective lens pole piece is optimized for ultrahigh spatial resolution observation. While maintaining this capability, the shape of the pole piece was further optimized for X-ray solid angle and take-off angle of the large-sized Dual SDDs (158 mm2). As the result, the effective X-ray detection efficiency of the FHP2 is more than twice as sensitive as that of the FHP. It can provide sub-angstrom resolution in EDS elemental maps. The TEM column is covered by a box-type enclosure, which can reduce the effect of environmental changes such as temperature, air flow, acoustic noise and so on, and then it improves the stability of microscope. ETA corrector & JEOL COSMO™ Quick & Accurate aberration correction JEOL COSMO™ uses only 2 Ronchigrams acquired from any amorphous area to measure and correct aberrations. Therefore, the system can provide Quick and Accurate aberration correction without dedicated specimens. Improvement of stability New CFEG (Cold Field Emission electron Gun) adopted a smaller SIP with a larger evacuation volume than before for GRAND ARM™2. Enhancement of evacuation volume of SIP improves the degree of vacuum near the emitter inside CFEG, and also improves the stability of emission and probe currents. The miniaturization of SIP can reduce the total mass of CFEG by ~100 kg. The weight saving of CFEG improves resistance to vibration for the microscope.