■FLuid:Gas N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Max.flow rate:Gas 1 line from 5SCCM to 10SLM / total 100SLM
■Accuracy:±1%F.S.
High performance mass flow controller adopted.
Mixed gas flow ration setting mode / mixed gas ratio setting mode switchable.
Program operation with pre-set conditions by step mode.
VNC server function for remote control.
Recorded operation status in data logging can be extracted via the USB port of the device at the back.
Emergency shutdown, upper and lower limit setting, totalized flow, authority settings, etc.