The long and successful history of Malvern Panalytical's Materials Research Diffractometers (MRD) continues with the generation of X’Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:
advanced materials science
scientific and industrial thin film technology
metrological characterization in semiconductor process development
The X’Pert³ MRD XL handles wide range of applications with full wafer mapping up to 200 mm.
Features
Future-proof system flexibility
The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control. The used technologies make all systems field upgradable to all existing options and new developments in hardware and software to come.
The X'Pert³ Extended MRD (XL) brings increased versatility to the range of X'Pert³ MRD systems. An extra PreFIX mounting platform allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing significantly the intensity of the incident beam.
One can benefit from increased application versatility without compromise on data quality, high-resolution X-ray diffraction with high intensities, shorter measurement times for measurements such as reciprocal space mapping and rebuild from standard to extended configuration in minutes thanks to the PreFIX concept. With the 2nd generation PreFIX, reconfiguring is easy and optics positioning is more accurate than ever.
X'Pert³ MRD (XL) In-plane
With the X'Pert³ MRD (XL) system for in-plane diffraction,