Measuring range [SCCM]
0...10
Accuracy [± % FS] max.
2.5
Humidity range
0...100% RH, resistant to water condensation
Supplier
Pewatron
Output signal
Linear, 1...5 VDC
Supply voltage [VDC]
8...14
Wetted materials
Silicon carbide, epoxy, PPS, FR4, silicone as static seal
Description
The PFLOW series of mass airflow sen-sors incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noiseto-signal, and unsurpassed repeatability. The “solid state” thermal isolation on the sensor die eliminates
the need for surface cavities or fragile membranes, used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor’s internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost.
The PFLOW series of mass airflow sensors covers the ranges from 10 sccm to 2000 sccm. The sensors are fully calibrated and compensated over the tempera-ture range of 0 to 50 °C (32 to 122 °F). The linearized analog output (1 to 5 V) provides customers with maximum flexibility and ease-of-use.