Measuring range [SCCM]
0...200
Accuracy [± % FS] max.
2
Humidity range
0...100% RH, resistant to water condensation
Supplier
Pewatron
Output signal
Linear, 1...5 VDC
Supply voltage [VDC]
8...14
Wetted materials
Silicon carbide, epoxy, PPS, FR4, silicone as static seal
Description
The PFLOW series of mass airflow sen-sors
incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair of
thermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noiseto-signal, and unsurpassed repeatability. The “solid
state” thermal isolation on the sensor die eliminates
the need for surface cavities or fragile membranes,
used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor’s internal signal conditioning circuitry leverages
an off-the-shelf microcontroller, providing proven
reliability and low cost.
The PFLOW series of mass airflow sensors covers
the ranges from 10 sccm to 2000 sccm. The sensors
are fully calibrated and compensated over the
tempera-ture range of 0 to 50 °C (32 to 122 °F). The
linearized analog output (1 to 5 V) provides
customers with maximum flexibility and ease-of-use.