Laboratory vacuum pump ATH 1600 M series

turbomolecular

ATH 1600 MT, DN 200 ISO-F, External Drive Electronics, Water-Cooled, Non-Heated Order number: P6522103 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N2 DN 200 CF-F flange for demanding UHV applications Operation with Magpower external drive electronics Installation in any orientation Water cooled, Heated CE marked and ROHS compliant Technical data Bearing Magnetically Compression ratio for Ar > 1 · 108 Compression ratio for H2 > 5 · 102 Compression ratio for He > 4 · 103 Compression ratio for N2 > 1 · 108 Cooling method Water Cooling method, standard Water Cooling water flow 60 l/h Cooling water flow, max 60 l/h Cooling water flow, min 60 l/h Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K Corrosive gas version YES Electronic drive unit External drive electronics Flange (in) DN 200 CF-F Flange (out) DN 40 ISO-KF Fore-vacuum max. for N2 2.2 hPa | 1.65 Torr | 2.2 mbar Gas throughput at full rotational speed for Ar, heated pump at 75 °C 8.5 hPa·l/s Gas throughput at full rotational speed for H2, heated pump at 75 °C > 16.9 hPa·l/s Gas throughput at full rotational speed for N2, heated pump at 75 °C 16.9 hPa·l/s Gas throughput for Ar 20.3 hPa·l/s Gas throughput for H2 > 67.6 hPa·l/s Gas throughput for He > 67.6 hPa·l/s Gas throughput for N2 67.6 hPa·l/s I/O interfaces Via External drive electronics Mounting orientation Any Operating voltage: 50/60 Hz 200 – 240 / 200 – 240, 50/60 Hz V AC Particulate matter YES Power consumption at ultimate pressure 300 W Power consumption max. 650 W Pumping speed for Ar 1280 l/s Pumping speed for H2 540 l/s