RX3000 is a single stage diaphragm pressure regulator for HP & UHP applications. The first of its kind threadless and springless pressure regulator for the highest level of purity.
Key advantages
Unique threadless design in all versions for a higher purity level
Spring less design for tied diaphragm version
Sub-atmospheric option available
Optimized supply pressure effect and excellent flow stability
Life duration according to CGA E4
Vacuum to 240 bar (3500 psi) inlet
Assembling, testing & packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Electropolished surface roughness per SEMI F19 UHP Grade
316L VA