RX2200 is a diaphragm pressure regulator for HP & UHP applications. Its springless and threadless design keeps the highest level of purity of the gas.
Key advantages
100% Functional & Helium Leak Test performed
Hastelloy® diaphragm
Internally spring- and threadless for highest UHP requirements
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Corrosion resistant internal option available: Hastelloy® poppet
Electropolished surface roughness per SEMI F19 UHP Grade
Coating option of wetted areas is available
316L VAR® stainless steel double melt per SEMI F20 option available
Fluid specific seat material as standard options
Additional multi-port options
Specifications
Max. inlet pressure 240 bar
Outlet Pressure 3/8/10/15/25/50 bar
Temperature range -20°C to +65°C
Flow capacity (cv) 0.2
Burst pressure* - 300% of operating pressure
Proof pressure* - 150% of operating pressure
Supply pressure effect i* 1.35 bar / 100 bar
Certified max. helium outboard leak rate ≤ 1 x 10-9 mbar.l/s
Certified max. helium across the seat leak rate (at max. pressure) - ≤ 1 x 10-7 mbar.l/s
Certified max. helium inboard leak rate (at max. pressure) ≤ 1 x 10-9 mbar.l/s