RX2500 is a diaphragm pressure regulator for HP & UHP applications. Its springless design keeps the highest level of purity of the gas. The regulator exists in two versions : standard version & high flow version.
Key advantages
100% Functional & Helium Leak Test performed
Hastelloy® diaphragm
Internally springless
Assembling, testing & Packaging in cleanroom: Class ISO 4
Individual serial number for full traceability
Corrosion resistant internal option available: Hastelloy® poppet
Electropolished surface roughness per SEMI F19 UHP Grade
316L VAR® stainless steel double melt per SEMI F20 option available
High-Flow (HF) version (Cv:1.2) up to 1150 SLPM available
Fluid specific seat material as standard options
Additional multi-port options