Thickness tester SK-FTM

laboratoryautomaticcompact

The compact film thickness monitor is a reflection spectrophotometric film thickness meter that uses a small reflection probe and is applicable in all situations from the laboratory level to in-line 100% inspection in the production process. It has excellent maintainability and can be used for incorporation into process equipment and line management. Simultaneous measurement of up to 9 types of transparent films is possible. It can be used as an in-line or end-point monitor for the various multi-layered film process. The compact probe can be installed in a small space inside the process tool. It is also possible to judge the mixture ratio of the mixed layer or the crystallinity of Poly-Silicon by using the EMA theory. Compact probe with the optical fiber can be installed in a small space inside the process tool. Good repeatability of the film thickness measurement 0.1 nm(3a) Multilayer film thickness measurement up to 9 layers Material analysis function • Evaluation of mixing ratio of the composite material using EMA • Crystallinity and Analysisy of the optical constants Wireless(Option) Film thickness end point detection software is included Automatic mapping stage(Option) Recommended system requirements Room temperature - : 18 to 45 ℃ Long term - : < ±2.0℃/24Hours Short term - : < ±1.0℃/1Hour Humidity - : 45±20% (Under no condensation)