TT-DSR1 Desk SEM Coater model is a compact coating system which able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes are formed in a fast cycle time. The produced thin film is suitable for scanning electron microscopy (SEM) analysis.
The Desk Magnetron Sputter Coater (DSR1) is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system. It’s ergonomic design and small footprint of the DSR1 SEM coating system allows easy use of the system.
TT-DSR1, the modular of SEM sample preparation system, configured as a sputter coater and carbon coater (thread) with interchangeable heads in one instrument. It is a Scanning Electron Microscope (SEM) sample preparation system equipped with a rotary pump to achieve vacuum less than 50mTorr which is a suitable vacuum range for noble metals sputter coating and evaporation coating.
Two-stage, direct drive 4m3/h, rotary vane pump
High precision quartz crystal thickness monitor
Intuitive touch screen to control the coating process and rapid data input
User friendly software that can be updated via network
Control coating rate to achieve finer grain structures
Manual or automatic Timed and Thickness sputtering
Easy-to-change specimen stages (rotation stage as standard)